JPH0464713U - - Google Patents
Info
- Publication number
- JPH0464713U JPH0464713U JP10884790U JP10884790U JPH0464713U JP H0464713 U JPH0464713 U JP H0464713U JP 10884790 U JP10884790 U JP 10884790U JP 10884790 U JP10884790 U JP 10884790U JP H0464713 U JPH0464713 U JP H0464713U
- Authority
- JP
- Japan
- Prior art keywords
- target object
- laser beam
- speckle
- lens
- measuring meter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000005259 measurement Methods 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 3
- 238000001816 cooling Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10884790U JPH0464713U (en]) | 1990-10-16 | 1990-10-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10884790U JPH0464713U (en]) | 1990-10-16 | 1990-10-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0464713U true JPH0464713U (en]) | 1992-06-03 |
Family
ID=31855989
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10884790U Pending JPH0464713U (en]) | 1990-10-16 | 1990-10-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0464713U (en]) |
-
1990
- 1990-10-16 JP JP10884790U patent/JPH0464713U/ja active Pending
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